Inventor
WENG GUOCHONG
US5 patents
⚠️ This page may combine multiple inventors who share the name “WENG GUOCHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES MICROVISION INC
3 patentsUS10088438B2Oct 2, 2018
Method and system for inspecting an EUV mask
HERMES MICROVISION INC2 citations70
US9485846B2Nov 1, 2016
Method and system for inspecting an EUV mask
HERMES MICROVISION INC1 citations60
US9859089B2Jan 2, 2018
Method and system for inspecting and grounding an EUV mask
HERMES MICROVISION INC1 citations49