Inventor
WANG YOUJIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “WANG YOUJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES MICROVISION INC
4 patentsUS10088438B2Oct 2, 2018
Method and system for inspecting an EUV mask
HERMES MICROVISION INC2 citations70
US9164399B2Oct 20, 2015
Reticle operation system
HERMES MICROVISION INC2 citations61
US9485846B2Nov 1, 2016
Method and system for inspecting an EUV mask
HERMES MICROVISION INC1 citations60
US9859089B2Jan 2, 2018
Method and system for inspecting and grounding an EUV mask
HERMES MICROVISION INC1 citations49
ASML NETHERLANDS BV
3 patentsUS10775325B2Sep 15, 2020
Method and system for inspecting an EUV mask
ASML NETHERLANDS BV2 citations70
US11662323B2May 30, 2023
Method and system for inspecting an EUV mask
ASML NETHERLANDS BV0 citations60
US10643818B2May 5, 2020
Load lock system for charged particle beam imaging
ASML NETHERLANDS BV0 citations47