Inventor · disambiguated record
Mikio Ushijima
Also filed as: USHIJIMA MIKIO
2 granted patents·3 pending applications·25 citations·filing 2001–2024
57Inventor score
Top patents by PatentIndex Score
5 records- 0173US6768124B2Reticle-focus detector, and charged-particle-beam microlithography apparatus and methods comprising sameNIKON CORP·Filed 2001·Granted Jul 27, 2004·24 cites·52 claims
- 0264US11791223B2Substrate bonding apparatus and substrate bonding methodNIKON CORP·Filed 2018·Granted Oct 17, 2023·1 cites·25 claims
- 0364US2024014079A1Substrate bonding apparatus and substrate bonding methodNIKON CORP·Filed 2023·Application pending·0 cites
- 0455US2024404859A1Substrate correction device, substrate lamination device, substrate processing system, substrate correction method, substrate processing method, and semiconductor device manufacturing methodNIKON CORP·Filed 2024·Application pending·0 cites
- 0533US2011288674A1Apparatus for managing a holder, apparatus for manufacturing a layered semiconductor and method for managing a holderSUGAYA ISAO·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →