Inventor
SHAH VIVEK BHARAT
US14 patents
Patents
14 patentsUS10748797B2Aug 18, 2020
Plasma parameters and skew characterization by high speed imaging
APPLIED MATERIALS INC2 citations72
US11488811B2Nov 1, 2022
Chucking process and system for substrate processing chambers
APPLIED MATERIALS INC2 citations70
US11859275B2Jan 2, 2024
Techniques to improve adhesion and defects for tungsten carbide film
APPLIED MATERIALS INC0 citations61
US11545376B2Jan 3, 2023
Plasma parameters and skew characterization by high speed imaging
APPLIED MATERIALS INC0 citations61
US11495440B2Nov 8, 2022
Plasma density control on substrate edge
APPLIED MATERIALS INC0 citations61
US11120976B2Sep 14, 2021
Apparatus and methods for removing contaminant particles in a plasma process
APPLIED MATERIALS INC0 citations61
US10892143B2Jan 12, 2021
Technique to prevent aluminum fluoride build up on the heater
APPLIED MATERIALS INC1 citations61
US12020911B2Jun 25, 2024
Chucking process and system for substrate processing chambers
APPLIED MATERIALS INC0 citations60
US12585232B2Mar 24, 2026
Substrate support characterization to build a digital twin
APPLIED MATERIALS INC0 citations59
US12327714B2Jun 10, 2025
Plasma generation quality monitoring using multi-channel sensor data
APPLIED MATERIALS INC0 citations57
US10714319B2Jul 14, 2020
Apparatus and methods for removing contaminant particles in a plasma process
APPLIED MATERIALS INC0 citations51
US10790121B2Sep 29, 2020
Plasma density control on substrate edge
APPLIED MATERIALS INC0 citations50
US12517479B2Jan 6, 2026
Manufacturing equipment parts quality management system
APPLIED MATERIALS INC0 citations47
US10688538B2Jun 23, 2020
Aluminum fluoride mitigation by plasma treatment
APPLIED MATERIALS INC0 citations40