Inventor

ZHAO JIANPING

CN67 patents

⚠️ This page may combine multiple inventors who share the name “ZHAO JIANPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHAO JIANPING

TOKYO ELECTRON LTD

Plasma processing system with synchronized signal modulation

Electric pressure systems for control of plasma properties and uniformity

Broadband plasma processing systems and methods

Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties

Quantification of processing chamber species by electron energy sweep

Electric pressure systems for control of plasma properties and uniformity

Impedance matching apparatus and control method

Broadband plasma processing systems and methods

Scalable and uniformity controllable diffusion plasma source

Plasma enhanced film formation method

Cyclic low temperature film growth processes

Broadband plasma processing systems and methods

Hard mask deposition using direct current superimposed radio frequency plasma

Cyclic low temperature film growth processes

Plasma generation and control using a DC ring

Stable surface wave plasma source

Plasma processing with broadband RF waveforms

Plasma processing with broadband RF waveforms

Multi-cell resonator microwave surface-wave plasma apparatus

Microwave plasma device

Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus

Controlling etch rate drift and particles during plasma processing

Microwave surface-wave plasma device

Microwave plasma device

Microwave plasma device

Method and system for high precision etching of substrates

Microwave surface-wave plasma device

Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus

ALD process with plasma treatment

HUAWEI TECH CO LTD

Multi-beam antenna system and phase adjustment method for multi-beam antenna system, and dual-polarized antenna system

Interleaved polarized multi-beam antenna

Antenna system, feeding network reconfiguration method, and apparatus

Radio frequency unit, antenna, and signal processing method

Antenna apparatus and beam adjustment method

Antenna system

Method of communication with distributed antenna array system and array system

CHEN LEE

Stable surface wave plasma source

Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources

Using vacuum ultra-violet (VUV) data in microwave sources

Ion energy analyzer

ZHAO JIANPING

Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus

Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques

Spliceable and foldable filter element device

Movable contact mechanism of double-breakpoint circuit breaker

FUNK MERRITT

Ion energy analyzer and methods of manufacturing the same

Methods of electrical signaling in an ion energy analyzer

CHEN ZHIYING

Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof

Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof

UNIV QUFU NORMAL

Curved conformal frequency selective surface radome

BRAVENEC RONALD VICTOR

Method and system for characterizing a plasma