Inventor
REBHAN ULRICH
DE15 patents
⚠️ This page may combine multiple inventors who share the name “REBHAN ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAMBDA PHYSIK AG
12 patentsUS6804327B2Oct 12, 2004
Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
LAMBDA PHYSIK AG89 citations97
US6650679B1Nov 18, 2003
Preionization arrangement for gas laser
LAMBDA PHYSIK AG28 citations92
US6466599B1Oct 15, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG28 citations92
US6414978B2Jul 2, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG14 citations92
US6727731B1Apr 27, 2004
Energy control for an excimer or molecular fluorine laser
LAMBDA PHYSIK AG27 citations90
US6414828B1Jul 2, 2002
Laser ventilation system
LAMBDA PHYSIK AG31 citations86
US6493364B1Dec 10, 2002
Beam shutter for excimer laser
LAMBDA PHYSIK AG41 citations85
US6587202B2Jul 1, 2003
Optical materials testing method
LAMBDA PHYSIK AG9 citations73
US6556609B2Apr 29, 2003
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG8 citations73
US6430205B2Aug 6, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG4 citations73
US6618422B2Sep 9, 2003
Preionization arrangement for a gas laser
LAMBDA PHYSIK AG4 citations62
US6735233B2May 11, 2004
Gas discharge laser with means for removing gas impurities
LAMBDA PHYSIK AG5 citations61