Inventor

TANG WAYNE

US4 patents

⚠️ This page may combine multiple inventors who share the name “TANG WAYNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US6934606B1Aug 23, 2005

Automatic calibration of a wafer-handling robot

NOVELLUS SYSTEMS INC89 citations91

US7811153B1Oct 12, 2010

High throughput servo load cup with integrated wet chemistry delivery

NOVELLUS SYSTEMS INC11 citations79

BLANK RICH

1 patent

US8757345B2Jun 24, 2014

Magnetic rotational hardstop for robot

BLANK RICH9 citations76

LAM RES CORP

1 patent

US11885750B2Jan 30, 2024

Integrated wafer bow measurements

LAM RES CORP0 citations61