Inventor
OKADA KANAME
JP6 patents
Patents
6 patentsUS6829084B2Dec 7, 2004
Ultraviolet and vacuum ultraviolet antireflection substrate
ASAHI GLASS CO LTD22 citations92
US6475575B1Nov 5, 2002
Pellicle and method for manufacture thereof
ASAHI GLASS CO LTD24 citations89
US6795170B2Sep 21, 2004
Structure for attaching a pellicle to a photo-mask
ASAHI GLASS CO LTD16 citations80
US6628456B2Sep 30, 2003
Ultraviolet and vacuum ultraviolet antireflection substrate
ASAHI GLASS CO LTD9 citations73
US6744562B2Jun 1, 2004
Pellicle
ASAHI GLASS CO LTD9 citations72
US7934391B2May 3, 2011
Synthetic quartz glass body, process for producing the same, optical element, and optical apparatus
ASAHI GLASS CO LTD4 citations62