Inventor
HSU KUANG-HUAN
TW17 patents
⚠️ This page may combine multiple inventors who share the name “HSU KUANG-HUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS10255785B1Apr 9, 2019
Intelligent environmental and security monitoring system
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US11195720B2Dec 7, 2021
Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11901206B2Feb 13, 2024
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11587811B2Feb 21, 2023
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11011401B2May 18, 2021
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12050153B2Jul 30, 2024
Method for monitoring transport vehicle and maintenance thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12272580B2Apr 8, 2025
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12051593B2Jul 30, 2024
Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11615961B2Mar 28, 2023
Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10867823B2Dec 15, 2020
Fault detection method in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US11626315B2Apr 11, 2023
Semiconductor structure and planarization method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6647307B1Nov 11, 2003
Method for controlling queue time constraints in a fabrication facility
TAIWAN SEMICONDUCTOR MFG28 citations86
US6574521B2Jun 3, 2003
System and method for managing work-in-process (WIP) workload within a fabrication facility
TAIWAN SEMICONDUCTOR MFG7 citations72
US7035705B2Apr 25, 2006
System and method for process contamination prevention for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG4 citations59