Inventor · disambiguated record
Keon-Sik Seo
Also filed as: SEO KEON SIK
5 granted patents·24 citations·filing 2005–2013
75Inventor score
Top patents by PatentIndex Score
5 records- 0181US8662956B2Conditioner of chemical mechanical polishing apparatusSEO KEON SIK·Filed 2011·Granted Mar 4, 2014·10 cites·11 claims
- 0276US8597081B2Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unitCHOI JAE-KWANG·Filed 2011·Granted Dec 3, 2013·4 cites·20 claims
- 0369US8882563B2Chemical mechanical polishing systemBOO JAE PHIL·Filed 2011·Granted Nov 11, 2014·4 cites·9 claims
- 0467US7196011B2Apparatus and method for treating substratesSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 27, 2007·6 cites·29 claims
- 0539US9620392B2Single type apparatus for drying a substrate and single type system for cleaning a substrate including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Apr 11, 2017·0 cites·21 claims
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