Inventor
OP 'T ROOT WILHELMUS PATRICK ELISABETH MARIA
NL13 patents
⚠️ This page may combine multiple inventors who share the name “OP 'T ROOT WILHELMUS PATRICK ELISABETH MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS9728931B2Aug 8, 2017
Electron injector and free electron laser
ASML NETHERLANDS BV5 citations81
US10627724B2Apr 21, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations69
US9645510B2May 9, 2017
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
ASML NETHERLANDS BV3 citations68
US10146133B2Dec 4, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations66
US11774867B2Oct 3, 2023
Radiation measurement system
ASML NETHERLANDS BV0 citations61
US11569628B2Jan 31, 2023
Pulse stretcher and method
ASML NETHERLANDS BV0 citations51
US11287743B2Mar 29, 2022
Control system and method
ASML NETHERLANDS BV0 citations51
US10103508B2Oct 16, 2018
Electron injector and free electron laser
ASML NETHERLANDS BV0 citations49
US10146134B2Dec 4, 2018
Illumination system
ASML NETHERLANDS BV1 citations48
US9933709B2Apr 3, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations36