Inventor
ZHONG QIN
US8 patents
⚠️ This page may combine multiple inventors who share the name “ZHONG QIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS12379671B2Aug 5, 2025
Model based dynamic positional correction for digital lithography tools
APPLIED MATERIALS INC0 citations54
US10996572B2May 4, 2021
Model based dynamic positional correction for digital lithography tools
APPLIED MATERIALS INC1 citations54
US10451564B2Oct 22, 2019
Empirical detection of lens aberration for diffraction-limited optical system
APPLIED MATERIALS INC0 citations51
US10585360B2Mar 10, 2020
Exposure system alignment and calibration method
APPLIED MATERIALS INC0 citations50
US12099308B2Sep 24, 2024
Methods and apparatus for correcting lithography systems
APPLIED MATERIALS INC0 citations40