Inventor
HONG SEONGJIN
KR7 patents
Patents
7 patentsUS11053440B2Jul 6, 2021
Silicon nitride etching composition and method
ENTEGRIS INC3 citations71
US10651045B2May 12, 2020
Compositions and methods for etching silicon nitride-containing substrates
ENTEGRIS INC3 citations68
US11697767B2Jul 11, 2023
Silicon nitride etching composition and method
ENTEGRIS INC0 citations57
US12272560B2Apr 8, 2025
Selective removal of metal oxide hard masks
ENTEGRIS INC0 citations54
US12152187B2Nov 26, 2024
Nitride etchant composition and method
ENTEGRIS INC0 citations54
US11441229B2Sep 13, 2022
Method for selectively removing nickel platinum material
ENTEGRIS INC0 citations47
US11492709B2Nov 8, 2022
Method and composition for etching molybdenum
ENTEGRIS INC0 citations45