Inventor
WU HSING-CHEN
TW9 patents
Patents
9 patentsUS11053440B2Jul 6, 2021
Silicon nitride etching composition and method
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US10651045B2May 12, 2020
Compositions and methods for etching silicon nitride-containing substrates
ENTEGRIS INC3 citations68
US11788007B2Oct 17, 2023
Method for removing hard masks
ENTEGRIS INC0 citations61
US11697767B2Jul 11, 2023
Silicon nitride etching composition and method
ENTEGRIS INC0 citations57
US10290505B2May 14, 2019
Passivation of germanium surfaces
ENTEGRIS INC0 citations50
US11152219B2Oct 19, 2021
Selectively etching materials
ENTEGRIS INC0 citations49
US9765288B2Sep 19, 2017
Compositions for cleaning III-V semiconductor materials and methods of using same
ENTEGRIS INC0 citations40
US12129418B2Oct 29, 2024
Selective etchant compositions and methods
ENTEGRIS INC0 citations38
US10340150B2Jul 2, 2019
Ni:NiGe:Ge selective etch formulations and method of using same
ENTEGRIS INC0 citations38