Inventor
MATSUMURA KOSABURO
JP2 patents
Patents
2 patentsUS5212043AMay 18, 1993
Photoresist composition comprising a non-aromatic resin having no aromatic structures derived from units of an aliphatic cyclic hydrocarbon and units of maleic anhydride and/or maleimide and a photosensitive agent
TOSOH CORP117 citations95
US5677380AOct 14, 1997
Planarizing material and planarizing method
TOSOH CORP19 citations90