Inventor

SHIH CHIH-TSUNG

TW131 patents

⚠️ This page may combine multiple inventors who share the name “SHIH CHIH-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIH CHIH-TSUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of making an extreme ultraviolet pellicle

Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof

EUV focus monitoring systems and methods

EUV lithography mask with a porous reflective multilayer structure

Method of fabricating semiconductor structure with heating element

Facet profile to improve edge coupler beam pointing and coupling efficiency for photonics

EUV lithography mask with a porous reflective multilayer structure

Optical device for coupling light

Method for detecting EUV pellicle rupture

Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning

Layout modification method for exposure manufacturing process

Method for integrated circuit patterning

Pellicle for EUV mask and fabrication thereof

Extreme ultraviolet lithography process and mask

Interconnection structure and methods of fabrication the same

EUV mask and manufacturing method by using the same

Method of making an extreme ultraviolet pellicle

Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof

Assist feature for a photolithographic process

Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof

High durability extreme ultraviolet photomask

Extreme ultraviolet mask and method of manufacturing the same

Extreme ultraviolet mask and method of manufacturing the same

Particle prevention method in lithography exposure apparatus

Methods and apparatus for removing contamination from lithographic tool

Optical device for coupling light and method for fabricating the same

Two-dimensional grating coupler and methods of making same

Optical waveguide coupler

Semiconductor structure with heating element

Optical device for coupling light

Two-dimensional grating coupler and methods of making same

Semiconductor device with heating structure

Mask with multilayer structure and manufacturing method by using the same

Method to define multiple layer patterns with a single exposure by charged particle beam lithography

Extreme ultraviolet (EUV) mask and method of fabricating the EUV mask

High speed optical receiver system

EUV lithography mask with a porous reflective multilayer structure

TAIWAN SEMICONDUCTOR MFG

Method for integrated circuit patterning

Method to define multiple layer patterns using a single exposure

Reflective mask and method of making same

Method to define multiple layer patterns with a single exposure by E-beam lithography

Extreme ultraviolet lithography process and mask

IND TECH RES INST

Electro-optical modulator with curving resonator

Apparatus for single-molecule detection

Single molecule detection system and methods

CHIOU CHUNG-FAN

Apparatus for single-molecule detection

Apparatus for single-molecule detection

SHIH CHIH-TSUNG

Bonding system for optical alignment

Light-emitting diode package having electrostatic discharge protection function and method of fabricating the same

HSU PEI-CHENG

Reflective mask and method of making same