Inventor
DESAI SAMEER
US10 patents
⚠️ This page may combine multiple inventors who share the name “DESAI SAMEER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6200911B1Mar 13, 2001
Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps using differential plasma power
APPLIED MATERIALS INC57 citations95
US6579811B2Jun 17, 2003
Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating
APPLIED MATERIALS INC19 citations92
US6410457B1Jun 25, 2002
Method for improving barrier layer adhesion to HDP-FSG thin films
APPLIED MATERIALS INC17 citations92
US6803325B2Oct 12, 2004
Apparatus for improving barrier layer adhesion to HDP-FSG thin films
APPLIED MATERIALS INC12 citations73