Inventor
LUBLIN LEONARD
US4 patents
Patents
4 patentsUS6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
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US6563128B2May 13, 2003
Base stabilization system
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US6704339B2Mar 9, 2004
Lithography laser with beam delivery and beam pointing control
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US6791098B2Sep 14, 2004
Multi-input, multi-output motion control for lithography system
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