Inventor

KLENE BRIAN C

US2 patents

⚠️ This page may combine multiple inventors who share the name “KLENE BRIAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

1 patent

US6704339B2Mar 9, 2004

Lithography laser with beam delivery and beam pointing control

CYMER INC50 citations91

TCZ PTE LTD

1 patent

US7167499B2Jan 23, 2007

Very high energy, high stability gas discharge laser surface treatment system

TCZ PTE LTD38 citations84