Inventor · disambiguated record
Nobuhiro Kodachi
Also filed as: KODACHI NOBUHIRO
5 granted patents·93 citations·filing 1991–2003
81Inventor score
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0176US6532056B2Alignment system and projection exposure apparatusCANON KK·Filed 1998·Granted Mar 11, 2003·33 cites·32 claims
- 0271US5963316AMethod and apparatus for inspecting a surface stateCANON KK·Filed 1997·Granted Oct 5, 1999·32 cites·5 claims
- 0355US5105092AInspecting apparatus having a detection sensitivity controller meansCANON KK·Filed 1991·Granted Apr 14, 1992·23 cites·8 claims
- 0453US6683673B2Alignment system and projection exposure apparatusCANON KK·Filed 2003·Granted Jan 27, 2004·3 cites·9 claims
- 0550US6847432B2Alignment system and projection exposure apparatusCANON KK·Filed 2003·Granted Jan 25, 2005·2 cites·10 claims
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