Inventor

NAGAHAMA HIROMI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NAGAHAMA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBAURA MECHATRONICS CORP

1 patent

US7403278B2Jul 22, 2008

Surface inspection apparatus and surface inspection method

SHIBAURA MECHATRONICS CORP21 citations87

TOSHIBA CERAMICS CO

1 patent

US7226513B2Jun 5, 2007

Silicon wafer cleaning method

TOSHIBA CERAMICS CO0 citations42