Inventor
PAGES XAVIER
FR5 patents
⚠️ This page may combine multiple inventors who share the name “PAGES XAVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
4 patentsUS7410355B2Aug 12, 2008
Method for the heat treatment of substrates
ASM INT60 citations95
US7153772B2Dec 26, 2006
Methods of forming silicide films in semiconductor devices
ASM INT27 citations92
US7022627B2Apr 4, 2006
Method for the heat treatment of substrates
ASM INT40 citations89
US7691750B2Apr 6, 2010
Methods of forming films in semiconductor devices with solid state reactants
ASM INT13 citations83