Inventor
YANO TASUKU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YANO TASUKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS9644955B2May 9, 2017
Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same
HITACHI HIGH TECH CORP2 citations72
US7928384B2Apr 19, 2011
Localized static charge distribution precision measurement method and device
HITACHI HIGH TECH CORP2 citations58
US9312091B2Apr 12, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US7714288B2May 11, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations40