Inventor
SHIMODA TOSHIMASA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SHIMODA TOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS6499880B2Dec 31, 2002
Static pressure air bearing
NIKON CORP18 citations90
US6328473B1Dec 11, 2001
Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus
NIKON CORP15 citations80
US6735867B2May 18, 2004
Method of making a static pressure air bearing
NIKON CORP5 citations71