Inventor
YOSHIHASHI MASAHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIHASHI MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THK CO LTD
4 patentsMAEDA HIDEHIRO
2 patentsUS9240339B2Jan 19, 2016
Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
MAEDA HIDEHIRO2 citations60
US8570704B2Oct 29, 2013
Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
MAEDA HIDEHIRO2 citations60