Inventor

BATZ MARION

DE2 patents

⚠️ This page may combine multiple inventors who share the name “BATZ MARION”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US9336983B2May 10, 2016

Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

ZEISS CARL SMT GMBH8 citations75

Hoinkis Elke

1 patent

US11961705B2Apr 16, 2024

Method and apparatus for examining a beam of charged particles

Hoinkis Elke0 citations32