Inventor
THAULAD PETER S
US5 patents
Patents
5 patentsUS10796940B2Oct 6, 2020
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP5 citations69
US9349629B2May 24, 2016
Touch auto-calibration of process modules
LAM RES CORP3 citations69
US11581214B2Feb 14, 2023
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP2 citations65
US10509052B2Dec 17, 2019
Smart vibration wafer with optional integration with semiconductor processing tool
LAM RES CORP2 citations64
US12341040B2Jun 24, 2025
Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
LAM RES CORP0 citations46