Inventor
OKURA SHIGEYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “OKURA SHIGEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7883076B2Feb 8, 2011
Semiconductor processing system and vaporizer
TOKYO ELECTRON LTD15 citations83
US7547003B2Jun 16, 2009
Vaporizing apparatus and semiconductor processing system
TOKYO ELECTRON LTD14 citations83
US7452424B2Nov 18, 2008
Vaporizer
TOKYO ELECTRON LTD14 citations83
US9777377B2Oct 3, 2017
Film forming method and film forming device
TOKYO ELECTRON LTD2 citations72
US10870920B2Dec 22, 2020
Gas supply device and valve device
TOKYO ELECTRON LTD3 citations71
US8382903B2Feb 26, 2013
Vaporizer and semiconductor processing system
TOKYO ELECTRON LTD5 citations71
US12571096B2Mar 10, 2026
Raw material gas supply system and raw material gas supply method
TOKYO ELECTRON LTD1 citations63
US10767262B2Sep 8, 2020
Gas supply apparatus and gas supply method
TOKYO ELECTRON LTD1 citations60
US10113235B2Oct 30, 2018
Source gas supply unit, film forming apparatus and source gas supply method
TOKYO ELECTRON LTD0 citations41
US10584414B2Mar 10, 2020
Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas
TOKYO ELECTRON LTD0 citations30