Inventor
UM YOUNG JE
KR8 patents
Patents
8 patentsUS12308219B2May 20, 2025
Substrate treating method and substrate treating apparatus
SEMES CO LTD1 citations60
US12237151B2Feb 25, 2025
Apparatus and method for processing substrate using plasma
SEMES CO LTD0 citations59
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12146710B2Nov 19, 2024
Substrate treating apparatus and substrate treating system comprising the same
SEMES CO LTD0 citations57
US12555749B2Feb 17, 2026
Substrate treating method and substrate treating apparatus
SEMES CO LTD0 citations50
US12315699B2May 27, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations48
US12451358B2Oct 21, 2025
Method for fabricating semiconductor device and apparatus for processing substrate using plasma
SEMES CO LTD0 citations47
US12463015B2Nov 4, 2025
Substrate processing apparatus and method using the plasma
SEMES CO LTD0 citations46