P

Inventor

ITO KENYA

JP88 patents
⚠️ This page may combine multiple inventors who share the name “ITO KENYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

29 patents
USD777546SJan 31, 2017

Work holder for polishing apparatus

EBARA CORP407 citations97
US7682225B2Mar 23, 2010

Polishing apparatus and substrate processing apparatus

EBARA CORP46 citations96
US6036582AMar 14, 2000

Polishing apparatus

EBARA CORP61 citations96
US6578891B1Jun 17, 2003

Substrate holder and substrate transfer apparatus using the same

EBARA CORP49 citations93
US7055535B2Jun 6, 2006

Holding unit, processing apparatus and holding method of substrates

EBARA CORP38 citations92
US6932884B2Aug 23, 2005

Substrate processing apparatus

EBARA CORP26 citations92
US6543080B1Apr 8, 2003

Apparatus and method for cleaning semiconductor substrate

EBARA CORP35 citations92
US6494220B1Dec 17, 2002

Apparatus for cleaning a substrate such as a semiconductor wafer

EBARA CORP31 citations92
US6308361B1Oct 30, 2001

Cleaning apparatus

EBARA CORP21 citations92
US6248009B1Jun 19, 2001

Apparatus for cleaning substrate

EBARA CORP30 citations92
US6092542AJul 25, 2000

Cleaning apparatus

EBARA CORP21 citations92
US10328465B2Jun 25, 2019

Substrate processing apparatus and substrate processing method

EBARA CORP6 citations84
US9566616B2Feb 14, 2017

Substrate processing apparatus

EBARA CORP5 citations84
US9248545B2Feb 2, 2016

Substrate processing apparatus and substrate processing method

EBARA CORP7 citations84
US8047896B2Nov 1, 2011

Polishing apparatus, polishing method, and processing apparatus

EBARA CORP11 citations84
US7976361B2Jul 12, 2011

Polishing apparatus and polishing method

EBARA CORP8 citations84
US7862402B2Jan 4, 2011

Polishing apparatus and substrate processing apparatus

EBARA CORP10 citations84
US8029333B2Oct 4, 2011

Device for polishing peripheral edge of semiconductor wafer

EBARA CORP11 citations83
US7476290B2Jan 13, 2009

Substrate processing apparatus and substrate processing method

EBARA CORP9 citations82
US7578886B2Aug 25, 2009

Substrate processing apparatus, substrate processing method, and substrate holding apparatus

EBARA CORP14 citations81
US6141812ANov 7, 2000

Cleaning apparatus and cleaning member rinsing apparatus

EBARA CORP9 citations74
US6116994ASep 12, 2000

Polishing apparatus

EBARA CORP9 citations74
US10155294B2Dec 18, 2018

Polishing apparatus and polishing method

EBARA CORP2 citations73
US9914196B2Mar 13, 2018

Polishing apparatus and polishing method

EBARA CORP2 citations73
US9808903B2Nov 7, 2017

Method of polishing back surface of substrate and substrate processing apparatus

EBARA CORP3 citations73
US9393595B2Jul 19, 2016

Abrasive film fabrication method and abrasive film

EBARA CORP3 citations73
US8748289B2Jun 10, 2014

Method for manufacturing semiconductor device

EBARA CORP5 citations73
US10403505B2Sep 3, 2019

Substrate processing method and substrate processing apparatus

EBARA CORP5 citations72
US9492910B2Nov 15, 2016

Polishing method

EBARA CORP5 citations72

HITACHI LTD

11 patents

CHISSO CORP

5 patents

NAKANISHI MASAYUKI

2 patents

TOSHIBA KK

1 patent

TAKAHASHI TAMAMI

1 patent

SEKI MASAYA

1 patent

Showing the top 50 of 88 patents by PatentIndex Score.