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Inventor
TATSUNO TOSHIO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “TATSUNO TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MORITA KAGAKU KOGYO
2 patents
US5147605A
Sep 15, 1992
Method for the sterilization of ultrapure water line
MORITA KAGAKU KOGYO
40 citations
91
US5282967A
Feb 1, 1994
Method for feeding germ-free pure water
MORITA KAGAKU KOGYO
16 citations
72
DAINIPPON SCREEN MFG
1 patent
US5112437A
May 12, 1992
Oxide film removing apparatus and removing method thereof using azeotropic vapor mixture
DAINIPPON SCREEN MFG
38 citations
90