Inventor
HESS MIGNON P
US6 patents
Patents
6 patentsUS6273108B1Aug 14, 2001
Apparatus and method for processing the surface of a workpiece with ozone
SEMITOOL INC93 citations98
US6267125B1Jul 31, 2001
Apparatus and method for processing the surface of a workpiece with ozone
SEMITOOL INC104 citations98
US6817370B2Nov 16, 2004
Method for processing the surface of a workpiece
SEMITOOL INC29 citations95
US6591845B1Jul 15, 2003
Apparatus and method for processing the surface of a workpiece with ozone
SEMITOOL INC33 citations95
US6701941B1Mar 9, 2004
Method for treating the surface of a workpiece
SEMITOOL INC18 citations92
US6601594B2Aug 5, 2003
Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece
SEMITOOL INC20 citations92