Inventor
ZHAO YUEXING
US10 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO YUEXING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS6303551B1Oct 16, 2001
Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper film
LAM RES CORP55 citations96
US6165956ADec 26, 2000
Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
LAM RES CORP46 citations96
US6162301ADec 19, 2000
Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
LAM RES CORP56 citations96
US6593282B1Jul 15, 2003
Cleaning solutions for semiconductor substrates after polishing of copper film
LAM RES CORP21 citations92
US6294027B1Sep 25, 2001
Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
LAM RES CORP26 citations92
US6479443B1Nov 12, 2002
Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film
LAM RES CORP15 citations84
US6552812B1Apr 22, 2003
Method and system for measuring threshold length
LAM RES CORP13 citations83
US6927198B2Aug 9, 2005
Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
LAM RES CORP9 citations73