Inventor
LEE EUNG-JOON
KR10 patents
⚠️ This page may combine multiple inventors who share the name “LEE EUNG-JOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS6329276B1Dec 11, 2001
Method of forming self-aligned silicide in semiconductor device
SAMSUNG ELECTRONICS CO LTD44 citations90
US6355554B1Mar 12, 2002
Methods of forming filled interconnections in microelectronic devices
SAMSUNG ELECTRONICS CO LTD15 citations83
US7199019B2Apr 3, 2007
Method for forming tungsten contact plug
SAMSUNG ELECTRONICS CO LTD7 citations73
US7311109B2Dec 25, 2007
Method for cleaning a processing chamber and method for manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations62
US7566667B2Jul 28, 2009
Methods of fabricating a semiconductor device having a barrier metal layer and devices formed thereby
SAMSUNG ELECTRONICS CO LTD2 citations61
US7375025B2May 20, 2008
Method for forming a metal silicide layer in a semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations61
US7005373B2Feb 28, 2006
Method for forming a metal silicide layer in a semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations51
US6797618B2Sep 28, 2004
Method for forming silicide film of a semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations51
CUBIXEL CO LTD
2 patentsUS12436376B2Oct 7, 2025
Flying-over beam pattern scanning hologram microscope device using scan mirror and translation stage
CUBIXEL CO LTD2 citations68
US12493175B2Dec 9, 2025
Flying-over beam pattern scanning hologram microscope device using spatial modulation scanner and translation stage
CUBIXEL CO LTD0 citations44