Inventor
KEUM GYEONG-SU
KR9 patents
Patents
9 patentsUS6858854B2Feb 22, 2005
Method and apparatus for measuring inclination angle of ion beam
SAMSUNG ELECTRONICS CO LTD22 citations89
US6449585B1Sep 10, 2002
Wafer sidewall inspection system and method
SAMSUNG ELECTRONICS CO LTD19 citations86
US6720533B2Apr 13, 2004
Heater assembly for heating a wafer
SAMSUNG ELECTRONICS CO LTD11 citations72
US6705020B2Mar 16, 2004
Method of and apparatus for use in orienting an object at a reference angle
SAMSUNG ELECTRONICS CO LTD3 citations53
US7652264B2Jan 26, 2010
Filament member, ion source, and ion implantation apparatus
SAMSUNG ELECTRONICS CO LTD1 citations51
US6590378B2Jul 8, 2003
Real time parameter monitoring apparatus for high voltage chamber in semiconductor wafer processing system
SAMSUNG ELECTRONICS CO LTD1 citations51
US7170070B2Jan 30, 2007
Ion implanters having an arc chamber that affects ion current density
SAMSUNG ELECTRONICS CO LTD1 citations50
US7112810B2Sep 26, 2006
Ion implanting apparatus and ion implanting method using the same
SAMSUNG ELECTRONICS CO LTD1 citations47
US6903336B2Jun 7, 2005
Polarity exchanger and ion implanter having the same
SAMSUNG ELECTRONICS CO LTD0 citations46