Inventor
YANG YUN-SIK
KR14 patents
⚠️ This page may combine multiple inventors who share the name “YANG YUN-SIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
13 patentsUS6537143B1Mar 25, 2003
Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD32 citations92
US6039770AMar 21, 2000
Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers
SAMSUNG ELECTRONICS CO LTD47 citations92
US7578944B2Aug 25, 2009
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD23 citations91
US7193369B2Mar 20, 2007
Method for generating gas plasma
SAMSUNG ELECTRONICS CO LTD30 citations91
US6684652B2Feb 3, 2004
Method of and an apparatus for regulating the temperature of an electrostatic chuck
SAMSUNG ELECTRONICS CO LTD22 citations90
US6623597B1Sep 23, 2003
Focus ring and apparatus for processing a semiconductor wafer comprising the same
SAMSUNG ELECTRONICS CO LTD53 citations86
US6860801B2Mar 1, 2005
Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD14 citations83
US6443826B1Sep 3, 2002
Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same
SAMSUNG ELECTRONICS CO LTD15 citations83
US6816029B2Nov 9, 2004
RF matching unit
SAMSUNG ELECTRONICS CO LTD9 citations73
US9773645B2Sep 26, 2017
Remote plasma generator using ceramic
SAMSUNG ELECTRONICS CO LTD4 citations70
US7764483B2Jul 27, 2010
Semiconductor etching apparatus
SAMSUNG ELECTRONICS CO LTD4 citations62
US6705020B2Mar 16, 2004
Method of and apparatus for use in orienting an object at a reference angle
SAMSUNG ELECTRONICS CO LTD3 citations53
US6824617B2Nov 30, 2004
Input/output valve switching apparatus of semiconductor manufacturing system
SAMSUNG ELECTRONICS CO LTD0 citations50