Inventor · disambiguated record
Shoichi Harakawa
Also filed as: HARAKAWA SHOICHI
8 granted patents·3 pending applications·59 citations·filing 1999–2012
84Inventor score
Files withTOSHIBA KK7HARAKAWA SHOICHI1KABUSHIK KAISHA TOSHIBA1MIYAZAKI KUNIHIRO1TOYOTA MOTOR CO LTD1
Top patents by PatentIndex Score
11 records- 0188US7556899B2System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2006·Granted Jul 7, 2009·12 cites·20 claims
- 0271US7831330B2Process control system, process control method, and method of manufacturing electronic apparatusTOSHIBA KK·Filed 2009·Granted Nov 9, 2010·2 cites·10 claims
- 0368US6745094B1Semiconductor processing process control system and its control methodTOSHIBA KK·Filed 2000·Granted Jun 1, 2004·11 cites·15 claims
- 0461US6505090B1Semiconductor device manufacturing method, manufacturing system, support system and recording medium storing program of and data for the manufacture methodTOSHIBA KK·Filed 1999·Granted Jan 7, 2003·27 cites·20 claims
- 0559US7596421B2Process control system, process control method, and method of manufacturing electronic apparatusKABUSHIK KAISHA TOSHIBA·Filed 2006·Granted Sep 29, 2009·2 cites·11 claims
- 0646US7630052B2Exposure processing system, exposure processing method and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2004·Granted Dec 8, 2009·1 cites·15 claims
- 0746US6925343B2Flow conversion system for a manufacturing process, method for converting a process flow, system for controlling manufacturing process, method for controlling a manufacturing process and a computer program productTOSHIBA KK·Filed 2004·Granted Aug 2, 2005·3 cites·16 claims
- 0846US6853870B2Semiconductor processing process control system and its control methodTOSHIBA KK·Filed 2004·Granted Feb 8, 2005·1 cites·4 claims
- 0946US2014260800A1Method for producing magnetic powder for forming sintered body that is precursor of rare-earth magnetTOYOTA MOTOR CO LTD·Filed 2012·Application pending·0 cites
- 1043US2007233302A1System for controlling production of electronic devices, system and method for producing electronic devices, and computer program productMIYAZAKI KUNIHIRO·Filed 2006·Application pending·0 cites
- 1141US2007020537A1Exposure apparatus correction system, exposure apparatus correcting method, and manufacturing method of semiconductor deviceHARAKAWA SHOICHI·Filed 2006·Application pending·0 cites
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