Inventor
RAMACHANDRAN VINODH
SG11 patents
Patents
11 patentsUS11480865B2Oct 25, 2022
Method and apparatus to improve EUV mask blank flatness
APPLIED MATERIALS INC0 citations61
US11476097B2Oct 18, 2022
Common electrostatic chuck for differing substrates
APPLIED MATERIALS INC0 citations60
US10950475B1Mar 16, 2021
Method and apparatus for processing a substrate using non-contact temperature measurement
APPLIED MATERIALS INC0 citations60
US11629409B2Apr 18, 2023
Inline microwave batch degas chamber
APPLIED MATERIALS INC0 citations59
US11870202B2Jan 9, 2024
Solid-state power amplifiers with cooling capabilities
APPLIED MATERIALS INC0 citations55
US12492867B2Dec 9, 2025
Air shrouds with integrated heat exchanger
APPLIED MATERIALS INC0 citations54
US10677830B2Jun 9, 2020
Methods and apparatus for detecting microwave fields in a cavity
APPLIED MATERIALS INC0 citations51
US11699634B2Jul 11, 2023
Water cooled plate for heat management in power amplifiers
APPLIED MATERIALS INC0 citations49
US12165907B2Dec 10, 2024
Apparatus for rotating substrates
APPLIED MATERIALS INC0 citations45
US11860528B2Jan 2, 2024
Multi-chamber substrate processing platform
APPLIED MATERIALS INC0 citations45
US11630001B2Apr 18, 2023
Apparatus for measuring temperature in a vacuum and microwave environment
APPLIED MATERIALS INC0 citations43