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Inventor
KASTENMEIER BERND
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KASTENMEIER BERND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
2 patents
US7157373B2
Jan 2, 2007
Sidewall sealing of porous dielectric materials
IBM
13 citations
82
US7125782B2
Oct 24, 2006
Air gaps between conductive lines for reduced RC delay of integrated circuits
IBM
15 citations
82
UNIV NEW YORK STATE RES FOUND
1 patent
US6060400A
May 9, 2000
Highly selective chemical dry etching of silicon nitride over silicon and silicon dioxide
UNIV NEW YORK STATE RES FOUND
79 citations
91