Inventor · disambiguated record
Atsushi Kitaoka
Also filed as: KITAOKA ATSUSHI
11 granted patents·101 citations·filing 1992–2008
90Inventor score
Top patents by PatentIndex Score
11 records- 0190US7180574B2Exposure apparatus and methodCANON KK·Filed 2005·Granted Feb 20, 2007·14 cites·9 claims
- 0283US8747745B2Apparatus and method for biochemical analysisKITAOKA ATSUSHI·Filed 2008·Granted Jun 10, 2014·11 cites·9 claims
- 0377US6552798B2Position detecting method and system for use in exposure apparatusCANON KK·Filed 2001·Granted Apr 22, 2003·15 cites·51 claims
- 0465US6754302B2X-ray exposure apparatusCANON KK·Filed 2002·Granted Jun 22, 2004·8 cites·17 claims
- 0564US7256590B2Capacitance sensor type measuring apparatusCANON KK·Filed 2006·Granted Aug 14, 2007·3 cites·4 claims
- 0664US5377009AAlignment methodCANON KK·Filed 1992·Granted Dec 27, 1994·19 cites·26 claims
- 0761US5586159ASubstrate holding system and exposure apparatus having the sameCANON KK·Filed 1995·Granted Dec 17, 1996·21 cites·15 claims
- 0855US7212015B2Capacitance sensor type measuring apparatusCANON KK·Filed 2004·Granted May 1, 2007·5 cites·8 claims
- 0952US6891927B2Light generation apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted May 10, 2005·3 cites·15 claims
- 1045US8175810B2Sample processing apparatus and sample processing methodKITAOKA ATSUSHI·Filed 2007·Granted May 8, 2012·0 cites·5 claims
- 1143US7019538B2Electrostatic capacitance sensor type measurement apparatusCANON KK·Filed 2004·Granted Mar 28, 2006·2 cites·7 claims
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