Inventor
HE XUJIANG
SG3 patents
Patents
3 patentsUS7596841B2Oct 6, 2009
Micro-electromechanical devices and methods of fabricating thereof
AGENCY SCIENCE TECH & RES11 citations79
US7018862B2Mar 28, 2006
Micromachined electromechanical device
AGENCY SCIENCE TECH & RES4 citations60
US7208806B2Apr 24, 2007
Micromachined electromechanical device
AGENCY SCIENCE TECH & RES0 citations49