Inventor
TODA MAMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TODA MAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IIZUKA TOSHIHIRO
3 patentsUS8815678B2Aug 26, 2014
Method for fabricating a metal-insulator-metal (MIM) capacitor having capacitor dielectric layer formed by atomic layer deposition (ALD)
IIZUKA TOSHIHIRO2 citations59
US8212299B2Jul 3, 2012
Semiconductor device having a thin film capacitor of a MIM (metal-insulator-metal) structure
IIZUKA TOSHIHIRO3 citations59
US8169013B2May 1, 2012
Metal-insulator-metal (MIM) capacitor having capacitor dielectric material selected from a group consisting of ZRO2, HFO2, (ZRX, HF1-X)O2 (0<x<1), (ZRy, Ti (O<y<1), (Hfz, Ti-z)O2 (O<z<1) and (Zrk, Ti1, Hfm)O2 (O<K, 1, m<1, K+1+m=1)
IIZUKA TOSHIHIRO2 citations59