Inventor
REN WEIMING
US103 patents
⚠️ This page may combine multiple inventors who share the name “REN WEIMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES MICROVISION INC
21 patentsUS10141160B2Nov 27, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC42 citations98
US9922799B2Mar 20, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC64 citations98
US9691586B2Jun 27, 2017
Apparatus of plural charged-particle beams
HERMES MICROVISION INC64 citations98
US9691588B2Jun 27, 2017
Apparatus of plural charged-particle beams
HERMES MICROVISION INC33 citations98
US9607805B2Mar 28, 2017
Apparatus of plural charged-particle beams
HERMES MICROVISION INC62 citations98
US10062541B2Aug 28, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC34 citations94
US9000395B2Apr 7, 2015
Energy filter for charged particle beam apparatus
HERMES MICROVISION INC16 citations93
US7960697B2Jun 14, 2011
Electron beam apparatus
HERMES MICROVISION INC24 citations92
US10236156B2Mar 19, 2019
Apparatus of plural charged-particle beams
HERMES MICROVISION INC13 citations84
US10115559B2Oct 30, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC4 citations84
US10109456B2Oct 23, 2018
Apparatus of plural charged-particle beams
HERMES MICROVISION INC5 citations84
US9048062B1Jun 2, 2015
Method for improving performance of an energy filter
HERMES MICROVISION INC8 citations84
US8003953B2Aug 23, 2011
Multi-axis magnetic lens
HERMES MICROVISION INC18 citations84
US7759653B2Jul 20, 2010
Electron beam apparatus
HERMES MICROVISION INC16 citations84
US8791425B2Jul 29, 2014
Multi-axis magnetic lens for focusing a plurality of charged particle beams
HERMES MICROVISION INC6 citations76
US10276347B2Apr 30, 2019
Apparatus of plural charged-particle beams
HERMES MICROVISION INC1 citations73
US10020164B2Jul 10, 2018
Charged particle beam apparatus
HERMES MICROVISION INC2 citations73
US9105440B2Aug 11, 2015
Apparatus of plural charged particle beams with multi-axis magnetic lens
HERMES MICROVISION INC5 citations73
US9048063B1Jun 2, 2015
Electron beam apparatus
HERMES MICROVISION INC5 citations73
US9000370B2Apr 7, 2015
System and method for controlling charge-up in an electron beam apparatus
HERMES MICROVISION INC4 citations73
US8618480B2Dec 31, 2013
Charged particle beam apparatus
HERMES MICROVISION INC6 citations73
ASML NETHERLANDS BV
20 patentsUS10879031B2Dec 29, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV30 citations98
US10643820B2May 5, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV29 citations98
US10395886B2Aug 27, 2019
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV16 citations94
US10541110B2Jan 21, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV5 citations84
US11804356B2Oct 31, 2023
Apparatus using multiple beams of charged particles
ASML NETHERLANDS BV2 citations73
US11705304B2Jul 18, 2023
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV2 citations73
US11594396B2Feb 28, 2023
Multi-beam inspection apparatus with single-beam mode
ASML NETHERLANDS BV2 citations73
US11469074B2Oct 11, 2022
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV3 citations73
US11398368B2Jul 26, 2022
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US11295930B2Apr 5, 2022
Method and apparatus for charged particle detection
ASML NETHERLANDS BV3 citations73
US11289304B2Mar 29, 2022
Apparatus using multiple beams of charged particles
ASML NETHERLANDS BV3 citations73
US11282675B2Mar 22, 2022
Multi-beam inspection apparatus with improved detection performance of signal electrons
ASML NETHERLANDS BV2 citations73
US11232928B2Jan 25, 2022
Multi-beam inspection apparatus
ASML NETHERLANDS BV2 citations73
US11062877B2Jul 13, 2021
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US11043354B2Jun 22, 2021
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV2 citations73
US10892138B2Jan 12, 2021
Multi-beam inspection apparatus with improved detection performance of signal electrons
ASML NETHERLANDS BV3 citations73
US10811222B2Oct 20, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV1 citations73
US10573487B2Feb 25, 2020
Apparatus of plural charged-particle beams
ASML NETHERLANDS BV3 citations73
US12196692B2Jan 14, 2025
Systems and methods for voltage contrast defect detection
ASML NETHERLANDS BV2 citations72
US12211669B2Jan 28, 2025
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV3 citations71
CHEN ZHONGWEI
3 patentsUS8294095B2Oct 23, 2012
Apparatus of plural charged particle beams with multi-axis magnetic lens
CHEN ZHONGWEI51 citations94
US8445862B2May 21, 2013
Apparatus of plural charged particle beams with multi-axis magnetic lens
CHEN ZHONGWEI16 citations84
US8436317B1May 7, 2013
Wien filter
CHEN ZHONGWEI19 citations84
REN WEIMING
3 patentsNIKON CORP
1 patentJAU JACK
1 patentHERMES-MICROVISION INC
1 patentShowing the top 50 of 103 patents by PatentIndex Score.