Inventor

CHEN ZHONG-WEI

US51 patents

⚠️ This page may combine multiple inventors who share the name “CHEN ZHONG-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN ZHONG-WEI

ASML NETHERLANDS BV

Apparatus using multiple beams of charged particles

Multi-beam inspection apparatus with single-beam mode

Apparatus using multiple beams of charged particles

Multi-beam inspection apparatus with improved detection performance of signal electrons

Multi-cell detector for charged particles

Multi-beam inspection apparatus with improved detection performance of signal electrons

Systems and methods for voltage contrast defect detection

In-die metrology methods and systems for process control

Multiple charged-particle beam apparatus with low crosstalk

Multiple landing energy scanning electron microscopy systems and methods

Beam current adjustment for charged-particle inspection system

Apparatus using multiple charged particle beams

Apparatus using multiple beams of charged particles

Apparatus using charged particle beams

Apparatus of plural charged-particle beams

Multi-beam inspection apparatus with improved detection performance of signal electrons

Apparatus of plural charged particle beams

Apparatus using charged particle beams

Multi-beam inspection apparatus

Apparatus using multiple charged particle beams

Apparatus for obtaining optical measurements in a charged particle apparatus

In-die metrology methods and systems for process control

Methods of inspecting samples with multiple beams of charged particles

Multiple charged-particle beam apparatus and methods

Multiple charged-particle beam apparatus and methods

Electron emitter and method of fabricating same

Systems and methods for voltage contrast defect detection

Systems and methods for signal electron detection

Multiple charged-particle beam apparatus and methods of operating the same using movable lenses

System and method for alignment of secondary beams in multi-beam inspection apparatus

Multi-beam inspection apparatus

HERMES MICROVISION INC

Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing

Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method

Charged particle detection devices

Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method

Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector

Charged particle system including segmented detection elements

Electron gun with magnetic immersion double condenser lenses

Electron beam apparatus

Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method

Dynamic focus adjustment with optical height detection apparatus in electron beam system

Method and apparatus for scanning semiconductor wafers using a scanning electron microscope

System and method for sample charge control

Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing

KLA INSTR CORP

Inspecting optical masks with electron beam microscopy

Inspecting optical masks with electron beam microscopy

Electron beam inspection system and method

HERMES MICROVISION INC TAIWAN

System and method to determine focus parameters during an electron beam inspection

ZHANG XU

Electron gun with magnetic immersion double condenser lenses

CHEN ZHONG-WEI

Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam