Inventor
ZHANG FRANK NAN
US9 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG FRANK NAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10784077B2Sep 22, 2020
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV5 citations81
US12196692B2Jan 14, 2025
Systems and methods for voltage contrast defect detection
ASML NETHERLANDS BV2 citations72
US12087542B2Sep 10, 2024
Image contrast enhancement in sample inspection
ASML NETHERLANDS BV0 citations60
US11513087B2Nov 29, 2022
Systems and methods for voltage contrast defect detection
ASML NETHERLANDS BV1 citations60
US11164719B2Nov 2, 2021
Image contrast enhancement in sample inspection
ASML NETHERLANDS BV0 citations60
US12494342B2Dec 9, 2025
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59
US11929232B2Mar 12, 2024
Systems and methods for charged particle flooding to enhance voltage contrast defect signal
ASML NETHERLANDS BV0 citations59