Inventor
THANU RAJKUMAR
US16 patents
Patents
16 patentsUS10710819B1Jul 14, 2020
Long reach vacuum robot with dual wafer pockets
APPLIED MATERIALS INC9 citations83
US11358809B1Jun 14, 2022
Vacuum robot apparatus for variable pitch access
APPLIED MATERIALS INC6 citations74
US11850745B2Dec 26, 2023
Multi-turn drive assembly and systems and methods of use thereof
APPLIED MATERIALS INC2 citations72
US11443973B2Sep 13, 2022
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC3 citations72
US11413744B2Aug 16, 2022
Multi-turn drive assembly and systems and methods of use thereof
APPLIED MATERIALS INC2 citations72
US11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US10537997B2Jan 21, 2020
Sensor based auto-calibration wafer
APPLIED MATERIALS INC3 citations69
US10968052B2Apr 6, 2021
Long reach vacuum robot with dual wafer pockets
APPLIED MATERIALS INC0 citations62
US12370672B2Jul 29, 2025
Multi-turn drive assembly and systems and methods of use thereof
APPLIED MATERIALS INC0 citations61
US12170220B2Dec 17, 2024
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC0 citations61
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11883958B2Jan 30, 2024
Robot apparatus including dual end effectors with variable pitch and methods
APPLIED MATERIALS INC1 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11770049B2Sep 26, 2023
Generating electric power for a robotic end effector
APPLIED MATERIALS INC0 citations56
US12226896B2Feb 18, 2025
Operations of robot apparatuses within rectangular mainframes
APPLIED MATERIALS INC0 citations50