Inventor

KUAN TUNG-SHENG

3 patents

Patents

3 patents

US5227330AJul 13, 1993

Comprehensive process for low temperature SI epit axial growth

IBM24 citations90

US5378651AJan 3, 1995

Comprehensive process for low temperature epitaxial growth

IBM39 citations88

US4316209AFeb 16, 1982

Metal/silicon contact and methods of fabrication thereof

IBM19 citations78