Inventor
HATA TAKEKI
JP5 patents
Patents
5 patentsUS5035750AJul 30, 1991
Processing method for semiconductor wafers
TAIYO SANSO CO LTD56 citations95
US5025597AJun 25, 1991
Processing apparatus for semiconductor wafers
TAIYO SANSO CO LTD58 citations95
US4932168AJun 12, 1990
Processing apparatus for semiconductor wafers
TAIYO SANSO CO LTD60 citations95
US4748817AJun 7, 1988
Method and apparatus for producing microfine frozen particles
TAIYO SANSO CO LTD56 citations93
US4704873ANov 10, 1987
Method and apparatus for producing microfine frozen particles
TAIYO SANSO CO LTD101 citations92