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Inventor
PAUFLER JOERG
DE
2 patents
Patents
2 patents
US5936713A
Aug 10, 1999
Method and device for producing features on a photolithographic layer
FRAUNHOFER GES FORSCHUNG
32 citations
89
US6844916B2
Jan 18, 2005
Method for improving image quality and for increasing writing speed during exposure of light-sensitive layers
FRAUNHOFER GES FORSCHUNG
0 citations
27