Inventor
KUMASAKA IWAO
JP5 patents
Patents
5 patentsUS5770895AJun 23, 1998
Operation control device and method for a plurality of electric power consuming systems
TOKYO ELECTRON LTD64 citations93
US6092980AJul 25, 2000
Substrate treatment equipment and method with testing feature
TOKYO ELECTRON LTD34 citations91
US5942012AAug 24, 1999
Heat treatment apparatus
TOKYO ELECTRON LTD17 citations82
US6122556ASep 19, 2000
Operating system for fabrication apparatus
TOKYO ELECTRON LTD19 citations77
US5822498AOct 13, 1998
Teaching method for loading arm for objects to be processed
TOKYO ELECTRON LTD11 citations68